Patent Assignment
Reel/Frame 052331/0017
Assignment of Assignor's Interest
Recorded: 2020-04-07
Pages: 5
Assignors
SHIH, CHIH-TSUNG
Executed: 2019-11-19
LIU, BO-TSUN
Executed: 2019-11-19
LEE, TSUNG CHUAN
Executed: 2019-11-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method for Detecting Euv Pellicle Rupture