Patent Assignment
Reel/Frame 052333/0047
Assignment of Assignor's Interest
Recorded: 2020-04-07
Pages: 3
Assignor
TOYOMAKI, TOSHIAKI
Executed: 2020-03-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Transfer Apparatus and Method