Patent Assignment
Reel/Frame 052344/0743
Assignment of Assignor's Interest
Recorded: 2020-04-08
Pages: 9
Assignors
IWASHITA, SHINYA
Executed: 2020-03-28
KIKUCHI, TAKAMICHI
Executed: 2020-03-26
NORO, NAOTAKA
Executed: 2020-03-27
HASEGAWA, TOSHIO
Executed: 2020-03-26
MORIYA, TSUYOSHI
Executed: 2020-03-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method