Patent Assignment
Reel/Frame 052359/0126
Assignment of Assignor's Interest
Recorded: 2020-04-09
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly