Patent Assignment
Reel/Frame 052361/0653
Assignment of Assignor's Interest
Recorded: 2020-04-10
Pages: 6
Assignors
CHIBA, KEIKO
Executed: 2020-01-30
ISHIDA, SHINGO
Executed: 2020-01-30
ANDO, TOSHIAKI
Executed: 2020-01-30
ITO, TOSHIKI
Executed: 2020-01-31
STACHOWIAK, TIMOTHY BRIAN
Executed: 2020-03-09
LIU, WEIJUN
Executed: 2020-03-09
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Pattern Forming Method and Methods for Manufacturing Processed Substrate, Optical Component and Quartz Mold Replica as Well as Coating Material for Imprint Pretreatment and Set Thereof with Imprint Resist