Patent Assignment
Reel/Frame 052366/0814
Assignment of Assignor's Interest
Recorded: 2020-04-10
Pages: 3
Assignor
LIU, LI-SHI
Executed: 2020-03-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Temperature-Controlled Plasma Generation System