Patent Assignment
Reel/Frame 052368/0132
Assignment of Assignor's Interest
Recorded: 2020-04-10
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Making 3D Source Drains with Hybrid Stacking for Optimum 3D Logic Layout