Patent Assignment
Reel/Frame 052371/0030
Assignment of Assignor's Interest
Recorded: 2020-04-10
Pages: 8
Assignors
OTANI, TOMONORI
Executed: 2020-02-11
ITO, TOSHIKI
Executed: 2020-01-31
KHUSNATDINOV, NIYAZ
Executed: 2020-02-12
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Pattern Forming Method, Coating Material for Imprint Pretreatment and Substrate Pretreatment Method