Patent Assignment
Reel/Frame 052375/0546
Assignment of Assignor's Interest
Recorded: 2020-04-13
Pages: 5
Assignors
YIN, LI-CHAO
Executed: 2019-06-28
CHIU, YULING
Executed: 2019-07-09
LIN, HUNG-BIN
Executed: 2019-07-09
YANG, YU-LUNG
Executed: 2019-07-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus for Processing Substrates or Wafers