Patent Assignment
Reel/Frame 052384/0377
Assignment of Assignor's Interest
Recorded: 2020-04-13
Pages: 4
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK,, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
System and Method for Thermal Management of Reticle in Semiconductor Manufacturing