Patent Assignment
Reel/Frame 052423/0330
Assignment of Assignor's Interest
Recorded: 2020-04-16
Pages: 3
Assignor
YOSHIDA, HIROSHI
Executed: 2020-03-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method