Patent Assignment
Reel/Frame 052432/0538
Assignment of Assignor's Interest
Recorded: 2020-04-17
Pages: 3
Assignors
SAKASHITA, MIKIYA
Executed: 2020-03-18
MATSUI, YUKITERU
Executed: 2020-03-18
GAWASE, AKIFUMI
Executed: 2020-03-18
Assignee
KIOXIA CORPORATION
1-21, SHIBAURA 3-CHOME, MINATO-KU, TOKYO, 108-0023, JAPAN
Covered Property
(1)
Polishing Device, Polishing Head, Polishing Method, and Method of Manufacturing Semiconductor Device