Patent Assignment
Reel/Frame 052435/0746
Assignment of Assignor's Interest
Recorded: 2020-04-19
Pages: 4
Assignors
KIKUCHI, YASUAKI
Executed: 2020-04-13
YAMAGUCHI, TATSUYA
Executed: 2020-04-13
OBARA, KAZUTERU
Executed: 2020-04-13
KUSAJIMA, RYUJI
Executed: 2020-04-03
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus