Patent Assignment
Reel/Frame 052442/0728
Assignment of Assignor's Interest
Recorded: 2020-04-20
Pages: 5
Assignors
LEI, WEI
Executed: 2020-04-13
XU, YI
Executed: 2020-04-13
LEI, YU
Executed: 2020-04-13
HA, TAE HONG
Executed: 2020-04-13
HUNG, RAYMOND
Executed: 2020-04-16
PETHE, SHIRISH A.
Executed: 2020-04-13
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods for Selective Deposition of Tungsten Atop a Dielectric Layer for Bottom Up Gapfill