Patent Assignment
Reel/Frame 052447/0111
Assignment of Assignor's Interest
Recorded: 2020-04-20
Pages: 6
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-8558, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Generation System, Laser Beam Size Controlling Method, and Electronic Device Manufacturing Method