Patent Assignment
Reel/Frame 052457/0079
Assignment of Assignor's Interest
Recorded: 2020-04-21
Pages: 7
Assignors
PORE, VILJAMI
Executed: 2012-08-15
HATANPÄÄ, TIMO
Executed: 2012-08-15
RITALA, MIKKO
Executed: 2012-08-15
LESKELÄ, MARKKU
Executed: 2012-08-15
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Properties
(3)
Synthesis and Use of Precursors for Ald of Group Va Element Containing Thin Films
Synthesis and Use of Precursors for Ald of Group Va Element Containing Thin Films
Synthesis and Use of Precursors for Ald of Group Va Element Containing Thin Films