Patent Assignment
Reel/Frame 052508/0369
Assignment of Assignor's Interest
Recorded: 2020-04-28
Pages: 7
Assignors
TEN BERGE, PETER
Executed: 2015-11-05
JENSEN, ERIK
Executed: 2015-11-06
MOS, EVERHARDUS CORNELIS
Executed: 2015-10-26
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2015-10-22
WARDENIER, PETER HANZEN
Executed: 2015-11-16
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus to Correct for Patterning Process Error