Patent Assignment
Reel/Frame 052512/0303
Assignment of Assignor's Interest
Recorded: 2020-04-28
Pages: 3
Assignor
HUNSCHE, STEFAN
Executed: 2013-11-07
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, 5504 DR, NETHERLANDS
Covered Property
(1)
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.