Patent Assignment
Reel/Frame 052520/0376
Assignment of Assignor's Interest
Recorded: 2020-04-29
Pages: 9
Assignors
CHENG, YU-HUNG
Executed: 2020-02-25
WU, CHENG-TA
Executed: 2020-04-29
LIU, PO-WEI
Executed: 2020-02-26
TU, YEUR-LUEN
Executed: 2019-12-23
CHANG, YU-CHUN
Executed: 2020-02-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Selective Polysilicon Growth for Deep Trench Polysilicon Isolation Structure