Patent Assignment
Reel/Frame 052564/0288
Assignment of Assignor's Interest
Recorded: 2020-05-04
Pages: 5
Assignors
CHO, HUNG-WEN
Executed: 2018-09-07
LIANG, FU-JYE
Executed: 2018-09-07
CHEN, CHUN-KUANG
Executed: 2018-09-25
SHIH, CHIH-TSUNG
Executed: 2018-09-30
CHEN, LI-JUI
Executed: 2018-10-02
CHENG, PO-CHUNG
Executed: 2018-09-30
LIN, CHIN-HSIANG
Executed: 2018-10-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Controlling Reticle Masking Blade Positioning to Minimize Impact on Critical Dimension Uniformity and Device for Controlling Reticle Masking Blade Positioning