Patent Assignment
Reel/Frame 052568/0474
Assignment of Assignor's Interest
Recorded: 2020-05-05
Pages: 3
Assignors
CHENG, RUI
Executed: 2020-02-14
JANAKIRAMAN, KARTHIK
Executed: 2020-03-04
HUANG, ZUBIN
Executed: 2020-02-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Methods for Improving Thermal Chemical Vapor Deposition (Cvd) Uniformity