Patent Assignment
Reel/Frame 052578/0914
Confirmatory License
Recorded: 2020-05-05
Pages: 2
Assignor
UNIVERSITY OF WASHINGTON
Executed: 2008-10-31
Assignee
UNITED STATES DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE. S.W., WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
Plasma-Based Euv Light Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.