Patent Assignment
Reel/Frame 052584/0497
Assignment of Assignor's Interest
Recorded: 2020-05-06
Pages: 3
Assignors
YAO, CHIH-YUAN
Executed: 2020-04-28
CHEN, YU-YU
Executed: 2020-04-28
TSOU, HSIANG-LUNG
Executed: 2020-04-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Manufacturing System and Particle Removal Method