Patent Assignment
Reel/Frame 052597/0387
Assignment of Assignor's Interest
Recorded: 2020-05-07
Pages: 2
Assignee
KOREA ATOMIC ENERGY RESEARCH INSTITUTE
111, DAEDEOK-DAERO 989BEON-GIL, YUSEONG-GU, DAEJEON, 34057, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Generation Device Including Matching Device, and Impedance Matching Method