Patent Assignment
Reel/Frame 052626/0317
Assignment of Assignor's Interest
Recorded: 2020-05-11
Pages: 6
Assignors
HATAKEYAMA, JUN
Executed: 2020-04-07
OHASHI, MASAKI
Executed: 2020-04-07
FUJIWARA, TAKAYUKI
Executed: 2020-04-07
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process