Patent Assignment
Reel/Frame 052698/0023
Assignment of Assignor's Interest
Recorded: 2020-05-19
Pages: 4
Assignors
LARSON, CHARLES THOMAS
Executed: 2020-05-18
SHAH, KAVITA
Executed: 2020-05-03
LEE, WEI TI
Executed: 2019-06-04
Assignee
NOVA MEASURING INSTRUMENTS, INC.
3090 OAKMEAD VILLAGE DRIVE, SANTA CLARA, CALIFORNIA, 95051
Covered Property
(1)
Xps Metrology for Process Control in Selective Deposition