Patent Assignment
Reel/Frame 052706/0747
Assignment of Assignor's Interest
Recorded: 2020-05-20
Pages: 7
Assignors
KAWAHARA, HIROYUKI
Executed: 2020-04-28
HASHIMOTO, KOJI
Executed: 2020-04-28
KIKUMOTO, NORIYUKI
Executed: 2020-05-07
SUMI, NORITAKE
Executed: 2020-05-11
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus