Patent Assignment
Reel/Frame 052721/0549
Assignment of Assignor's Interest
Recorded: 2020-05-21
Pages: 5
Assignors
LIU, SU-HAO
Executed: 2020-04-10
CHEN, KUO-JU
Executed: 2020-04-10
LEE, KAI-HSUAN
Executed: 2020-04-14
WONG, I-HSIEH
Executed: 2020-04-10
YANG, CHENG-YU
Executed: 2020-04-19
CHEN, LIANG-YIN
Executed: 2020-04-14
CHANG, HUICHENG
Executed: 2020-04-14
YEO, YEE-CHIA
Executed: 2020-04-13
JANG, SYUN-MING
Executed: 2020-04-14
CHOU, MENG-HAN
Executed: 2020-04-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Device having a Contact Plug with an Air Gap Spacer