Patent Assignment
Reel/Frame 052723/0723
Assignment of Assignor's Interest
Recorded: 2020-05-21
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Optical Diagnostics of Semiconductor Process Using Hyperspectral Imaging