Patent Assignment
Reel/Frame 052757/0981
Assignment of Assignor's Interest
Recorded: 2020-05-27
Pages: 5
Assignors
KORI, DAISUKE
Executed: 2020-03-27
SAWAMURA, TAKASHI
Executed: 2020-03-27
NIIDA, KEISUKE
Executed: 2020-03-27
TACHIBANA, SEIICHIRO
Executed: 2020-03-27
WATANABE, TAKERU
Executed: 2020-03-27
OGIHARA, TSUTOMU
Executed: 2020-03-27
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Material for Forming Organic Film, Substrate for Manufacturing Semiconductor Apparatus, Method for Forming Organic Film, and Patterning Process