Patent Assignment
Reel/Frame 052760/0611
Assignment of Assignor's Interest
Recorded: 2020-05-27
Pages: 8
Assignors
CHAE, SOO DOO
Executed: 2020-02-26
HAN, SANG CHEOL
Executed: 2020-02-26
PARK, YOUNGWOO
Executed: 2020-05-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Raised Pad Formations for Contacts in Three-Dimensional Structures on Microelectronic Workpieces