Patent Assignment
Reel/Frame 052774/0097
Assignment of Assignor's Interest
Recorded: 2020-05-28
Pages: 5
Assignor
AYABE, GO
Executed: 2020-05-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.