Patent Assignment
Reel/Frame 052774/0606
Assignment of Assignor's Interest
Recorded: 2020-05-28
Pages: 6
Assignors
LIMAN, CHRISTOPHER
Executed: 2020-05-20
GELLINEAU, ANTONIO ARION
Executed: 2020-04-14
SHCHEGROV, ANDREI V.
Executed: 2020-05-26
YOO, SUNGCHUL
Executed: 2020-04-13
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Methods And Systems For Combining X-Ray Metrology Data Sets To Improve Parameter Estimation