Patent Assignment
Reel/Frame 052774/0885
Assignment of Assignor's Interest
Recorded: 2020-05-28
Pages: 6
Assignors
SCHMITT-WEAVER, EMIL PETER
Executed: 2018-05-18
BHATTACHARYYA, KAUSTUVE
Executed: 2018-05-18
QUEENS, RENE MARINUS GERARDUS JOHAN
Executed: 2018-05-21
HENKE, WOLFGANG HELMUT
Executed: 2018-05-24
TEL, WIM TJIBBO
Executed: 2018-05-18
LINSCHOTEN, THEODORUS FRANCISCUS ADRIANUS MARIA
Executed: 2018-05-22
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
System and Method for Measurement of Alignment