Patent Assignment
Reel/Frame 052782/0418
Assignment of Assignor's Interest
Recorded: 2020-05-29
Pages: 4
Assignors
NAKAI, HITOSHI
Executed: 2020-05-22
OSUKA, TSUTOMU
Executed: 2020-05-25
YOSHIHARA, NAOHIKO
Executed: 2020-05-26
KANEMATSU, YASUNORI
Executed: 2020-05-25
OKUTANI, MANABU
Executed: 2020-05-25
AMAHISA, KENJI
Executed: 2020-05-25
HAYASHI, MASAYUKI
Executed: 2020-05-25
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus