Patent Assignment
Reel/Frame 052809/0828
Assignment of Assignor's Interest
Recorded: 2020-06-02
Pages: 5
Assignor
MORIKAWA, KATSUHIRO
Executed: 2020-05-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Drying Apparatus, Substrate Processing System, and Drying Method