Patent Assignment
Reel/Frame 052818/0153
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 2
Assignors
LONG, MAOLIN
Executed: 2018-10-31
WANG, YUHOU
Executed: 2018-10-31
WU, YING
Executed: 2018-11-02
PATERSON, ALEX
Executed: 2018-10-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Rf Pulsing Within Pulsing for Semiconductor Rf Plasma Processing