Patent Assignment
Reel/Frame 052821/0185
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 4
Assignors
LIAN, ZENGDI
Executed: 2020-06-02
ZUO, RASON
Executed: 2020-06-02
WU, DEE
Executed: 2020-06-02
GUAN, YU
Executed: 2020-06-02
CHEN, XINGJIAN
Executed: 2020-06-02
LIU, SHENJIAN
Executed: 2020-06-02
NI, TUQIANG
Executed: 2020-06-02
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Corrosion-Resistant Structure for a Gas Delivery System in a Plasma Processing Apparatus