Patent Assignment
Reel/Frame 052827/0415
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 5
Assignor
HAYASHI, TAKEHIDE
Executed: 2020-03-18
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Method for Evaluating Secondary Optical System of Electron Beam Inspection Device