Patent Assignment
Reel/Frame 052829/0050
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 2
Assignor
KUBOTA, SHINJI
Executed: 2020-01-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus