Patent Assignment
Reel/Frame 052829/0538
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 5
Assignors
DEYE, GREGORY
Executed: 2020-03-10
TOLLE, JOHN
Executed: 2020-05-01
MARGETIS, JOSEPH P.
Executed: 2020-04-30
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Cleaning Quartz Epitaxial Chambers