Patent Assignment
Reel/Frame 052868/0891
Assignment of Assignor's Interest
Recorded: 2020-06-08
Pages: 3
Assignors
LIN, BO-JIUN
Executed: 2015-10-15
CHEN, HAI-CHING
Executed: 2015-10-15
BAO, TIEN-I
Executed: 2015-10-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
System and Method of Forming a Porous Low-K Structure