Patent Assignment
Reel/Frame 052927/0196
Assignment of Assignor's Interest
Recorded: 2020-06-12
Pages: 3
Assignors
SAVANT, CHANDRASHEKHAR PRAKASH
Executed: 2020-04-27
TSAI, CHIA-MING
Executed: 2020-04-27
YU, TIEN-WEI
Executed: 2020-04-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Dopant Profile Control in Gate Structures for Semiconductor Devices