Patent Assignment
Reel/Frame 052928/0165
Assignment of Assignor's Interest
Recorded: 2020-06-12
Pages: 8
Assignors
NEGRI, DARIA
Executed: 2020-06-10
MANASSEN, AMNON
Executed: 2020-03-04
LAREDO, GILAD
Executed: 2020-05-14
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Method of Measuring Misregistration in the Manufacture of Topographic Semiconductor Device Wafers
System and Method for Measuring Misregistration of Semiconductor Device Wafers Utilizing Induced Topography