Patent Assignment
Reel/Frame 052929/0297
Assignment of Assignor's Interest
Recorded: 2020-06-12
Pages: 3
Assignor
CHEN, TING-JUNG
Executed: 2020-05-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Microelectromechanical System with Piezoelectric Film and Manufacturing Method Thereof