Patent Assignment
Reel/Frame 052931/0945
Assignment of Assignor's Interest
Recorded: 2020-06-12
Pages: 3
Assignor
LIN, YUN-YUE
Executed: 2020-05-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Robust, High Transmission Pellicle for Extreme Ultraviolet Lithography Systems