Patent Assignment
Reel/Frame 052946/0277
Assignment of Assignor's Interest
Recorded: 2020-06-16
Pages: 3
Assignors
BIWA, SATOSHI
Executed: 2020-06-08
OKAMURA, SATOSHI
Executed: 2020-06-09
GOSHI, GENTARO
Executed: 2020-06-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Control Method Thereof