Patent Assignment
Reel/Frame 052992/0606
Assignment of Assignor's Interest
Recorded: 2020-06-19
Pages: 5
Assignors
VAEZ-IRAVANI, MEHDI
Executed: 2020-06-12
EGAN, TODD J.
Executed: 2020-06-19
TANTIWONG, KYLE R.
Executed: 2020-06-12
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(2)
Real-Time Detection of Particulate Matter During Deposition Chamber Manufacturing
Application:
62/869,480 →
Real-Time Detection of Particulate Matter During Deposition Chamber Manufacturing