Patent Assignment
Reel/Frame 053021/0655
Assignment of Assignor's Interest
Recorded: 2020-06-24
Pages: 5
Assignors
PANDEY, NITESH
Executed: 2017-03-07
DEN BOEF, ARIE JEFFREY
Executed: 2017-05-10
VAN DAM, MARINUS JOHANNES MARIA
Executed: 2017-02-22
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective Filter for Use therein