Patent Assignment
Reel/Frame 053023/0476
Assignment of Assignor's Interest
Recorded: 2020-06-24
Pages: 4
Assignors
KIKAI, TAKAYA
Executed: 2020-06-05
KOGA, NORIHISA
Executed: 2020-06-10
TOMONO, MASARU
Executed: 2020-06-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Light Irradiating Device, Light Irradiating Method and Recording Medium